Author Details
Кузьменко, В. О.
| Issue | Section | Title | File |
| Vol 53, No 1 (2024) | ТЕХНОЛОГИИ | Parameters and Composition of Plasma in a Mixture of CF4 + H2 + Ar: Effect of the CF4/H2 Ratio | |
| Vol 53, No 6 (2024) | ДИАГНОСТИКА | Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma |