ДИАГНОСТИКА

Issue Title File
Vol 53, No 6 (2024) Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma PDF
(Rus)
Myakonkikh A.V., Kuzmenko V.O., Efremov A.M., Rudenko K.V.
Vol 53, No 5 (2024) Electron cyclotron resonance plasma studies using the second cyclotron harmonic resonance PDF
(Rus)
Kovalchuk А.V., Shapoval S.Y.
Vol 53, No 4 (2024) Study of the Photovoltaic Parameters of Inorganic Solar Cells Based on Cu2O and CuO PDF
(Rus)
Saenko A.V., Bilyk G.E., Smirnov V.A.
Vol 53, No 3 (2024) A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering PDF
(Rus)
Kurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E.
Vol 53, No 3 (2024) Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma PDF
(Rus)
Murin D.B., Grazhdyan A.Y., Chesnokov I.A., Gogulev I.A.
Vol 53, No 2 (2024) Structural features and electrical properties of si(al) thermal migration channels for high-voltage photovoltaic converters PDF
(Rus)
Lomov A.A., Seredin B.M., Martyushov S.Y., Tatarintsev A.A., Popov V.P., Malibashev A.V.
Vol 53, No 1 (2024) Analysis of Nonlinear Distortions of Dphemt Structures Based on a GaAs/InGaAs Compound with Double-Sided Delta-Doping PDF
(Rus)
Golikov O.L., Kodochigov N.E., Obolensky S.V., Puzanov A.S., Tarasova E.A., Khazanova S.V.
Vol 53, No 1 (2024) Structuring of the Surface of Thin Carbon Films During Activation by Microsecond Current Pulses PDF
(Rus)
Nefedov D.V., Shabunin N.O., Bratashov D.N.
Vol 52, No 6 (2023) PROBE AND SPECTRAL DIAGNOSTICS OF PLASMA GAS ENVIRONMENT: BCl3-Cl2 PDF
(Rus)
Murin D.B., Chesnokov I.A., Gogulev I.A., Grishkov A.E.
Vol 52, No 5 (2023) Electrophysical Parameters and Emission Spectra of the Glow Discharge of Difluorodichloromethane PDF
(Rus)
Murin D.B., Chesnokov I.A., Gogulev I.A., Grishkov A.E.
Vol 52, No 3 (2023) Surface Morphology and Photoluminescence Spectra of Pseudomorphic {InGaAs/GaAs} Superlattices on GaAs (100), (110), and (111)A Substrates PDF
(Rus)
Klimov E.A., Pushkarev S.S., Klochkov A.N., Mozhaeva M.O.
Vol 52, No 2 (2023) SEM Measurements of the Dimensions of Relief Structures in the Technological Process of Manufacturing Microcircuits PDF
(Rus)
Novikov Y.A., Filippov M.N.
Vol 52, No 1 (2023) Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy PDF
(Rus)
Murin D.B., Chesnokov I.A., Pivovarenok S.A., Efremov A.M.
Vol 52, No 1 (2023) Электрофизические характеристики и эмиссионные спектры плазмы тетрафторметана PDF
(Rus)
Мурин Д., Пивоваренок С., Чесноков И., Гогулев И.
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