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Study of the Influence of Ion-Beam Etching on the Surface Roughness of Single-Crystal Sapphire
Mikhailenko M., Pestov A., Zorina M., Chernyshev A., Chkhalo N., Shevchuk I.
Self-Forming Silicon Nitride Nanomask and Its Applications
Smirnov V., Kibalov D., Lepshin P., Zhuravlev I., Smirnova G.
Ion implantation: nanoporous germanium
Stepanov A., Nuzhdin V., Valeev V., Rogov А., Konovalov D.
Modification and Sputtering of Inhomogeneous Multilayer Oxidized Metal Films by Low-Current Argon Ion Beams
Lukiantsev D., Lubenchenko A., Ivanov D., Pavolotsky A., Lubenchenko O., Ivanova I., Pavlov O.
Radiation-stimulated processes under interaction of ions with porous structures
Nikiforova N., Oksengendler B., Ashurov K., Kutlimurotov B., Maksimov S., Galkina О.
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